How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation

نویسندگان

چکیده

Abstract We discuss how the emission of electrons and ions during electron-beam-induced physical vapor deposition can cause problems in micro- nanofabrication processes. After giving a short overview different types radiation emitted from an electron-beam (e-beam) evaporator amount depends on parameters conditions, we highlight two phenomena more detail: First, unintentional shadow evaporation beneath undercut resist layer caused by one part metal which got ionized electron-impact ionization. These first lead to build-up charges sample, turn results electrostatic deflection subsequently incoming atoms toward resist. Second, show low-energy secondary metallization process cross-linking, blisters, bubbles respective used for defining nanostructures e-beam lithography process. deposition, cross-linked may significant lift-off causes leftover residues device. provide troubleshooting guide minimize these effects, e.g. includes correct alignment e-beam, avoidance contaminations crucible and, most importantly, installation deflector electrodes within chamber.

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ژورنال

عنوان ژورنال: Journal of Physics D

سال: 2021

ISSN: ['1361-6463', '0022-3727']

DOI: https://doi.org/10.1088/1361-6463/abe89b